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Corrigendum: Extended scaling and Paschen law for micro-sized radiofrequency plasma breakdown (2017
<i>Plasma Sources Sci. Technol.</i>
<b>26</b>
034003)

Corrigendum: Extended scaling and Paschen law for micro-sized radiofrequency plasma breakdown (2017 Plasma Sources Sci. Technol. 26 034003)

Lee, Min Uk; Lee, Jimo; Lee, Jae Koo; Yun, Gunsu S

期刊名称Plasma Sources Science and Technology
作者Lee, Min Uk; Lee, Jimo; Lee, Jae Koo; Yun, Gunsu S
卷第26卷
期第5期
电子ISSN1361-6595
文件大小197.75KB
发表时间2017-04-05
DOI10.1088/1361-6595/aa6771

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