[IEEE 2017 IEEE 30th International Conference on Microelectronics (MIEL) - Nis (2017.10.9-2017.10.11)] 2017 IEEE 30th International Conference on Microelectronics (MIEL) - Evaluation of the mechanical and tribological properties of multilayer CrN/TiN films deposited at low temperatures

• 作者Kolaklieva, L.; Rabadzhiyska, S.; Kakanakov, R.; Chitanov, V.; Cholakova, T.; Rupetchov, V.; Mishev, G.
• 文件大小1061.00KB
• 发表时间2017
• DOI10.1109/miel.2017.8190099
• 页码187-190