An error self-compensation mechanism for deposition of optical coatings with broadband optical monitoring

Tikhonravov, A. V.; Kochikov, I. V.; Trubetskov, M. K.; Sharapova, S. A.; Zhupanov, V. G.; Yagola, A. G.

期刊名称Moscow University Physics Bulletin
作者Tikhonravov, A. V.; Kochikov, I. V.; Trubetskov, M. K.; Sharapova, S. A.; Zhupanov, V. G.; Yagola, A. G.
卷第72卷
期第3期
印刷ISSN0027-1349
电子ISSN1934-8460
文件大小591.29KB
发表时间2017-5
DOI10.3103/S0027134917030134
页码274-278

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