Atomic layer deposition of ultra-thin and smooth Al-doped ZnO for zero-index photonics
- 期刊名称Materials Research Express
- 作者Anopchenko, Aleksei; Gurung, Sudip; Tao, Long; Arndt, Catherine; Lee, Ho Wai Howard
- 电子ISSN2053-1591
- 文件大小2021.76KB
- 发表时间2018-01-09
- DOI10.1088/2053-1591/aaa653
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