Laser Self-Mixing Grating Interferometer for MEMS Accelerometer Testing
- 期刊名称IEEE Photonics Journal
- 作者Guo, Dongmei; Jiang, Haiqing; Shi, Liheng; Wang, Ming
- 卷第10卷
- 期第1期
- 电子ISSN1943-0655
- 文件大小780.21KB
- 发表时间2018-2
- DOI10.1109/JPHOT.2018.2792447
- 页码1-9
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