发现好书期刊，享受阅读乐趣

海量图书期刊资源，随时随地畅享阅读乐趣

System-level simulation and experiment for levitation control of micromachined electrostatically suspended accelerometer

System-level simulation and experiment for levitation control of micromachined electrostatically suspended accelerometer

Xiao, Qijun; Cui, Feng; Luo, Zhonghui

期刊名称Microsystem Technologies
作者Xiao, Qijun; Cui, Feng; Luo, Zhonghui
印刷ISSN0946-7076
电子ISSN1432-1858
文件大小2044.47KB
发表时间2018-4-21
DOI10.1007/s00542-018-3906-2

← 返回【学霸图书馆】主页