Low-temperature, plasma assisted, cyclic synthesis of MoS 2
- 期刊名称Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
- 作者Perini, Christopher J.; Muller, Michael J.; Wagner, Brent K.; Vogel, Eric M.
- 卷第36卷
- 期第3期
- 印刷ISSN2166-2746
- 电子ISSN2166-2754
- 文件大小3572.91KB
- 发表时间2018-05
- DOI10.1116/1.5023202