Resonant Acoustic MEMS Wake-Up Switch
Bernstein, Jonathan J.; Bancu, Mirela G.; Cook, Eugene H.; Duwel, Amy E.; Elliott, Richard D.; Gauthier, Douglas A.; Golmon, Stephanie L.; LeBlanc, John J.; Tomaino-Iannucci, Michael J.; Ung, Jonathan S.; Weinberg, Marc S.
- 期刊名称Journal of Microelectromechanical Systems
- 作者Bernstein, Jonathan J.; Bancu, Mirela G.; Cook, Eugene H.; Duwel, Amy E.; Elliott, Richard D.; Gauthier, Douglas A.; Golmon, Stephanie L.; LeBlanc, John J.; Tomaino-Iannucci, Michael J.; Ung, Jonathan S.; Weinberg, Marc S.
- 印刷ISSN1057-7157
- 电子ISSN1941-0158
- 文件大小5356.71KB
- 发表时间2018
- DOI10.1109/JMEMS.2018.2830322
- 页码1-10