Design optimization of a dynamically flat resonating micro-mirror for pico-projection applications
Farrugia, Russell; Grech, Ivan; Camilleri, Duncan; Casha, Owen; Micallef, Joseph; Gatt, Edward
- 期刊名称Microsystem Technologies
- 作者Farrugia, Russell; Grech, Ivan; Camilleri, Duncan; Casha, Owen; Micallef, Joseph; Gatt, Edward
- 印刷ISSN0946-7076
- 电子ISSN1432-1858
- 文件大小2645.11KB
- 发表时间2018-5-18
- DOI10.1007/s00542-018-3956-5