Design, Analysis, Simulation and Fabrication of a novel linear MEMS capacitive Inclinometer
- 期刊名称IEEE Sensors Journal
- 作者Hosseini, Fatemeh; Mehran, Mahdiyeh; Mohajerzadeh, Shamsoddin; Shoaei, Omid
- 印刷ISSN1530-437X
- 电子ISSN1558-1748
- 文件大小840.10KB
- 发表时间2018
- DOI10.1109/JSEN.2018.2851660
- 页码1-1