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[IEEE 2018 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) - Roma (2018.5.22-2018.5.25)] 2018 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) - Air damping analysis in resonating micro-mirrors

[IEEE 2018 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) - Roma (2018.5.22-2018.5.25)] 2018 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) - Air damping analysis in resonating micro-mirrors

Farrugia, Russell; Portelli, Barnaby; Grech, Ivan; Camilleri, Duncan; Casha, Owen; Micallef, Joseph; Gatt, Edward
  • 作者Farrugia, Russell; Portelli, Barnaby; Grech, Ivan; Camilleri, Duncan; Casha, Owen; Micallef, Joseph; Gatt, Edward
  • 文件大小2035.48KB
  • 发表时间2018
  • DOI10.1109/dtip.2018.8394220
  • 页码1-5
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