Hydrogen Radical Enhanced Atomic Layer Deposition of TaOx: Saturation Studies and Method for Oxygen Deficiency Control

Markeev, Andrey; Hwang, Cheol Seong; Egorov, Konstantin V.; Kuzmichev, Dmitry S.; Sigarev, Andrey A.; Myakota, Denis; Zarubin, Sergey S.; Perevalov, Timofey V; Gritsenko, Vladimir A; Chizov, Pavel S

期刊名称Journal of Materials Chemistry C
作者Markeev, Andrey; Hwang, Cheol Seong; Egorov, Konstantin V.; Kuzmichev, Dmitry S.; Sigarev, Andrey A.; Myakota, Denis; Zarubin, Sergey S.; Perevalov, Timofey V; Gritsenko, Vladimir A; Chizov, Pavel S
印刷ISSN2050-7526
电子ISSN2050-7534
文件大小1923.72KB
发表时间2018
DOI10.1039/c8tc00679b

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Hydrogen Radical Enhanced Atomic Layer Deposition of TaOx: Saturation Studies and Method for Oxygen Deficiency Control