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[IEEE 2018 13th IEEE Conference on Industrial Electronics and Applications (ICIEA) - Wuhan (2018.5.31-2018.6.2)] 2018 13th IEEE Conference on Industrial Electronics and Applications (ICIEA) - Levitation control system design for micromachined electrostatically suspended accelerometer

[IEEE 2018 13th IEEE Conference on Industrial Electronics and Applications (ICIEA) - Wuhan (2018.5.31-2018.6.2)] 2018 13th IEEE Conference on Industrial Electronics and Applications (ICIEA) - Levitation control system design for micromachined electrostatically suspended accelerometer

Qijun, Xiao; Zhonghui, Luo

作者Qijun, Xiao; Zhonghui, Luo
文件大小653.77KB
发表时间2018
DOI10.1109/ICIEA.2018.8397962
页码1585-1588

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