Post-Release Deformation and Motion Control of Photonic Waveguide Beams by Tuneable Electrothermal Actuators in Thick SiO2
- 期刊名称Micromachines
- 作者Wu, Kai; Tichem, Marcel
- 卷第9卷
- 期第10期
- 电子ISSN2072-666X
- 文件大小19072.76KB
- 发表时间2018-09-27
- DOI10.3390/mi9100496
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