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Masking coating formation by the focused ion beams method for plasma chemical treatment

Masking coating formation by the focused ion beams method for plasma chemical treatment

Kots, I N; Klimin, V S; Polyakova, V V; Rezvan, A A; Vakulov, Z E; Ageev, O A

期刊名称Journal of Physics: Conference Series
作者Kots, I N; Klimin, V S; Polyakova, V V; Rezvan, A A; Vakulov, Z E; Ageev, O A
卷第1124卷
印刷ISSN1742-6588
电子ISSN1742-6596
文件大小862.42KB
发表时间2018-12
DOI10.1088/1742-6596/1124/8/081035

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