Fabrication, characterization and electrochemical simulation of AlN-gate ISFET pH sensor
- 期刊名称Journal of Materials Science: Materials in Electronics
- 作者Sinha, Soumendu; Mukhiya, Ravindra; Sharma, Rishi; Khanna, P. K.; Khanna, V. K.
- 印刷ISSN0957-4522
- 电子ISSN1573-482X
- 文件大小1958.38KB
- 发表时间2019-3-6
- DOI10.1007/s10854-019-01033-5
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