Air damping of high performance resonating micro-mirrors with angular vertical comb-drive actuators
- 期刊名称Microsystem Technologies
- 作者Farrugia, Russell; Portelli, Barnaby; Grech, Ivan; Camilleri, Duncan; Casha, Owen; Micallef, Joseph; Gatt, Edward
- 印刷ISSN0946-7076
- 电子ISSN1432-1858
- 文件大小3764.08KB
- 发表时间2019-4-1
- DOI10.1007/s00542-019-04416-0
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