Analysis of longitudinal leaky surface acoustic wave propagation characteristics on a piezoelectric ScAlN layer/sapphire or quartz substrate
- 期刊名称Japanese Journal of Applied Physics
- 作者Suzuki, Masashi; Sawada, Naoya; Kakio, Shoji
- 卷第58卷
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小816.68KB
- 发表时间2019-07-01
- DOI10.7567/1347-4065/ab0ba5
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