Investigation of Fabrication Accuracy and Repeatability of High-Q Silicon-Micromachined Narrowband Sub-THz Waveguide Filters

Glubokov, Oleksandr; Zhao, Xinghai; Campion, James; Beuerle, Bernhard; Shah, Umer; Oberhammer, Joachim

期刊名称IEEE Transactions on Microwave Theory and Techniques
作者Glubokov, Oleksandr; Zhao, Xinghai; Campion, James; Beuerle, Bernhard; Shah, Umer; Oberhammer, Joachim
印刷ISSN0018-9480
电子ISSN1557-9670
文件大小45.26KB
发表时间2019
DOI10.1109/TMTT.2019.2926244
页码1-11

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