Sensing Amorphous/Crystalline Silicon Surface Passivation by Attenuated Total Reflection Infrared Spectroscopy of Amorphous Silicon on Glass

Abolmasov, S. N.; Abramov, A. S.; Semenov, A. V.; Shakhray, I. S.; Terukov, E. I.; Malchukova, E. V.; Trapeznikova, I. N.

期刊名称Semiconductors
作者Abolmasov, S. N.; Abramov, A. S.; Semenov, A. V.; Shakhray, I. S.; Terukov, E. I.; Malchukova, E. V.; Trapeznikova, I. N.
卷第53卷
期第8期
印刷ISSN1063-7826
电子ISSN1090-6479
文件大小603.73KB
发表时间2019-8
DOI10.1134/S1063782619080244
页码1114-1119

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