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Hydrophilic properties of surface of nanostructured tantalum films and its oxynitride compounds

Petrovskaya, A S; Lapitskaya, V A; Melnikova, G B; Kuznetsova, T A; Chizhik, S A; Zykova, A V; Safonov, V I

期刊名称Journal of Physics: Conference Series
作者Petrovskaya, A S; Lapitskaya, V A; Melnikova, G B; Kuznetsova, T A; Chizhik, S A; Zykova, A V; Safonov, V I
卷第1281卷
印刷ISSN1742-6588
电子ISSN1742-6596
文件大小908.30KB
发表时间2019-07
DOI10.1088/1742-6596/1281/1/012061