The Simulation and Research of Etching Function Based on Scanning Electrochemical Microscopy
- 期刊名称Nanomanufacturing and Metrology
- 作者Wang, Xiaole; Han, Lianhuan; Geng, Yanquan; Zhao, Xuesen; Cao, Yongzhi; Hu, Zhenjiang; Zhan, Dongping; Yan, Yongda
- 印刷ISSN2520-811X
- 电子ISSN2520-8128
- 文件大小2074.24KB
- 发表时间2019-8-31
- DOI10.1007/s41871-019-00047-1
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