On the Lateral Instability Analysis of MEMS Comb-Drive Electrostatic Transducers
- 期刊名称Sensors
- 作者Truong, Binh Duc; Le, Cuong Phu; Halvorsen, Einar
- 卷第19卷
- 期第17期
- 电子ISSN1424-8220
- 文件大小2627.62KB
- 发表时间2019-08-30
- DOI10.3390/s19173770
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