Cut Optimization for Redundant Via Insertion in Self-Aligned Double Patterning

• 期刊名称ACM Transactions on Design Automation of Electronic Systems
• 作者Song, Youngsoo; Hyun, Daijoon; Lee, Jingon; Jung, Jinwook; Shin, Youngsoo
• 卷第24卷
• 期第6期
• 印刷ISSN1084-4309
• 文件大小1374.21KB
• 发表时间2019-09-09
• DOI10.1145/3355391
• 页码1-21