Micro‐/Nanopillars for Micro‐ and Nanotechnologies Using Inductively Coupled Plasmas

• 期刊名称physica status solidi (a)
• 作者Herth, Etienne; Edmond, Samson; Bouville, David; Cercus, Jean Luc; Bayle, Fabien; Cambril, Edmond
• 印刷ISSN1862-6300
• 电子ISSN1862-6319
• 文件大小3265.47KB
• 发表时间2019-10-18
• DOI10.1002/pssa.201900324