Dissociative reactions induced by electron impact and electron transport in TEOS vapor
- 期刊名称Japanese Journal of Applied Physics
- 作者Kawaguchi, Satoru; Higuchi, Hisashi; Li, Hu; Denpoh, Kazuki; Takahashi, Kazuhiro; Satoh, Kohki
- 卷第58卷
- 期第6期
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小1279.73KB
- 发表时间2019-06-01
- DOI10.7567/1347-4065/ab215c
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