Development of 3D Fused Quartz Hemi-Toroidal Shells for High-Q Resonators and Gyroscopes

• 期刊名称Journal of Microelectromechanical Systems
• 作者Asadian, Mohammad H.; Wang, Yusheng; Shkel, Andrei M.
• 印刷ISSN1057-7157
• 电子ISSN1941-0158
• 文件大小7440.51KB
• 发表时间2019
• DOI10.1109/JMEMS.2019.2945713
• 页码1-11