Sputtering of aluminium nitride (002) film on cubic silicon carbide on silicon (100) substrate: influences of substrate temperature and deposition power
- 期刊名称Journal of Materials Science: Materials in Electronics
- 作者Iqbal, A.; Walker, G.; Hold, L.; Fernandes, A.; Lacopi, A.; Mohd-Yasin, F.
- 印刷ISSN0957-4522
- 电子ISSN1573-482X
- 文件大小5723.85KB
- 发表时间2019-12-5
- DOI10.1007/s10854-019-02480-w
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