Effects of Electrochemical Etching on InP HEMT Fabrication
- 期刊名称IEEE Transactions on Semiconductor Manufacturing
- 作者Saranovac, Tamara; Ruiz, Diego C.; Han, Daxin; Arabhavi, Akshay M.; Ostinelli, Olivier; Bolognesi, C. R.
- 卷第32卷
- 期第4期
- 印刷ISSN0894-6507
- 电子ISSN1558-2345
- 文件大小3672.32KB
- 发表时间2019-11
- DOI10.1109/TSM.2019.2940320
- 页码496-501
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