![Direct observation of a critical length effect in dual-damascene Cu/oxide interconnects]()
Direct observation of a critical length effect in dual-damascene Cu/oxide interconnectsOgawa, Ennis T.; Bierwag, Alexander J.; Lee, Ki-Don; Matsuhashi, Hideki; Justison, Patrick R.; Ramamurthi, Anup N.; Ho, Paul S.; Blaschke, Volker A.; Griffiths, David; Nelsen, Anne; Breen, Mark; Havemann, Robert H. · Applied Physics Letters · 2001