![[IEEE 2011 Joint conference of the IEEE International Frequency Control and the European Frequency and Time Forum (FCS) - San Francisco, CA, USA (2011.05.2-2011.05.5)] 2011 Joint Conference of the IEEE International Frequency Control and the European Frequency and Time Forum (FCS) Proceedings - Collective fabrication of 20 MHz resonators by deep Reactive Ion Etching on 3'' quartz wafers]()
[IEEE 2011 Joint conference of the IEEE International Frequency Control and the European Frequency and Time Forum (FCS) - San Francisco, CA, USA (2011.05.2-2011.05.5)] 2011 Joint Conference of the IEEE International Frequency Control and the European Frequency and Time Forum (FCS) Proceedings - Collective fabrication of 20 MHz resonators by deep Reactive Ion Etching on 3'' quartz wafersBoy, J. J.; Tavernier, H.; Vacheret, X.; Laroche, T.; Clairet, A. · 2011