![Hydrogen Radical Enhanced Atomic Layer Deposition of TaOx: Saturation Studies and Method for Oxygen Deficiency Control]()
Hydrogen Radical Enhanced Atomic Layer Deposition of TaOx: Saturation Studies and Method for Oxygen Deficiency ControlMarkeev, Andrey; Hwang, Cheol Seong; Egorov, Konstantin V.; Kuzmichev, Dmitry S.; Sigarev, Andrey A.; Myakota, Denis; Zarubin, Sergey S.; Perevalov, Timofey V; Gritsenko, Vladimir A; Chizov, Pavel S · Journal of Materials Chemistry C · 2018