![Photoresist Spray Coating Using a Shield Plate with an Aperture for Uniform Deposition onto Trench-Type Three-Dimensional Microdevice Structures]()
Photoresist Spray Coating Using a Shield Plate with an Aperture for Uniform Deposition onto Trench-Type Three-Dimensional Microdevice StructuresKumagai, Shinya; Fukuda, Naoya; Tajima, Hisayoshi; Sasaki, Minoru · Japanese Journal of Applied Physics · 2012