Hydrogen Gettering Effect of Mo[sub 2]N∕Mo MOS Process
- 期刊名称Journal of The Electrochemical Society
- 作者Kim, M. J.
- 卷第130卷
- 期第10期
- 印刷ISSN0013-4651
- 文件大小1497.97KB
- 发表时间1983
- DOI10.1149/1.2119531
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