![Absorption Coefficient and Sensitivity of Positive and Negative Resists in the Vacuum Ultraviolet Region]()
Absorption Coefficient and Sensitivity of Positive and Negative Resists in the Vacuum Ultraviolet RegionKudo, Kazuhiro; Miyazaki, Kenzo; Sakai, Hirofumi; Iwabuchi, Takashi; Mutoh, Katsuhiko; Miyata, Takeo; Tomiki, Tetsuhiko · Japanese Journal of Applied Physics · 1992