Contribution to ion implantation through a narrow slit at higher energies
- 作者A.G.K. Lutsch; H. Runge
- 卷第14卷
- 期第1期
- 印刷ISSN0026-2692
- 文件大小231.50KB
- 发表时间1983
- DOI10.1016/s0026-2692(83)80165-7
- 页码15-20
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