[IEEE 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems (MEMS) - Sorrento, Italy (2009.01.25-2009.01.29)] 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems - Design of Power-Optimized Thermal Cantilevers for Scanning Probe Topography SensingRothuizen, H.; Despont, M.; Drechsler, U.; Hagleitner, C.; Sebastian, A.; Wiesmann, D. · 2009

Energetic Nanoporous Silicon DevicesCurrano, L.J.; Churaman, W.A. · Journal of Microelectromechanical Systems · 2009

Two-Axis Microstage SystemBeverly, P.; Sivakumar, G.; Dallas, T. · Journal of Microelectromechanical Systems · 2008

Novel Capacitive Pressure SensorBakhoum, Ezzat G; Cheng, Marvin H M · Journal of Microelectromechanical Systems · 2010

Surface micromachined piezoelectric accelerometers (PiXLs)DeVoe, D.L.; Pisano, A.P. · Journal of Microelectromechanical Systems · 2001

Photopatternable Superhydrophobic Nanocomposites for MicrofabricationHong, Lingfei; Pan, Tingrui · Journal of Microelectromechanical Systems · 2010

Deformable Polymer Adaptive Optical MirrorsFriese, C.; Zappe, H. · Journal of Microelectromechanical Systems · 2008

Microorganisms for MEMSXiong, Xiaorong; Lidstrom, Mary E.; Parviz, Babak A. · Journal of Microelectromechanical Systems · 2007

A planar electroosmotic micropumpChuan-Hua Chen, ; Santiago, J.G. · Journal of Microelectromechanical Systems · 2002