![[ASME ASME 2009 International Mechanical Engineering Congress and Exposition - Lake Buena Vista, Florida, USA (November 13–19, 2009)] Volume 12: Micro and Nano Systems, Parts A and B - On-Chip Young’s Modulus Characterization of the Effect of Phosphorus Heavy Doping on Polysilicon Thin Films]()
[ASME ASME 2009 International Mechanical Engineering Congress and Exposition - Lake Buena Vista, Florida, USA (November 13–19, 2009)] Volume 12: Micro and Nano Systems, Parts A and B - On-Chip Young’s Modulus Characterization of the Effect of Phosphorus Heavy Doping on Polysilicon Thin FilmsBassiachvili, E.; Nieva, P.; Khajepour, A. · 2009