![SPIE Proceedings [SPIE Optics Quebec - Quebec City, Canada (Monday 16 August 1993)] Laser-Assisted Fabrication of Thin Films and Microstructures - <title>Synthesis of silicon-based dielectric films by excimer laser ablation</title>]()
SPIE Proceedings [SPIE Optics Quebec - Quebec City, Canada (Monday 16 August 1993)] Laser-Assisted Fabrication of Thin Films and Microstructures - <title>Synthesis of silicon-based dielectric films by excimer laser ablation</title>Fogarassy, Eric; Fuchs, Claude; Slaoui, Adelilah; de Unamuno, Salome; Stoquert, Jean-Paul; Marine, Vladimir I.; Lang, Bernard; Boyd, Ian W. · 1994