[IEEE 1991 Eighth International IEEE VLSI Multilevel Interconnection Conference - Santa Clara, CA, USA (11-12 June 1991)] 1991 Proceedings Eighth International IEEE VLSI Multilevel Interconnection Conference - Reaction mechanism of TEOS and O/sub 3/ atmospheric pressure CVD
- 作者Fujino, K.; Nishimoto, Y.; Tokumasu, N.; Maeda, K.
- 文件大小344.52KB
- 发表时间1991
- DOI10.1109/vmic.1991.153051
- 页码445-447
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