Experimental and theoretical study of image bias in x-ray lithography
- 期刊名称Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- 作者Guo, Jerry Z. Y.
- 卷第10卷
- 期第6期
- 印刷ISSN0734-211X
- 文件大小791.15KB
- 发表时间1992-11
- DOI10.1116/1.585901
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