Dependence of nucleation on shear-induced initial conditions
- 期刊名称Physical Review Letters
- 作者Min, K. Y.; Goldburg, W. I.
- 卷第71卷
- 期第4期
- 印刷ISSN0031-9007
- 文件大小842.04KB
- 发表时间1993-7-26
- DOI10.1103/physrevlett.71.569
- 页码569-572
Spin coating over topographyPeurrung, L.M.; Graves, D.B. · IEEE Transactions on Semiconductor Manufacturing · 1993
2014 VLSI Technology SymposuimIEEE Transactions on Semiconductor Manufacturing · 2014
Leading the field since 1884IEEE Transactions on Semiconductor Manufacturing · 2013
Supplier improvement via SPC applications workshopsAckermann, C.S. · IEEE Transactions on Semiconductor Manufacturing · 1993
Specular spectroscopic scatterometryXinhui Niu, ; Jakatdar, N.; Junwei Bao, ; Spanos, C.J. · IEEE Transactions on Semiconductor Manufacturing · 2001
A Continuous Murphy's IntegralNadarajah, S. · IEEE Transactions on Semiconductor Manufacturing · 2009
Defect size distribution in VLSI chipsGlang, R. · IEEE Transactions on Semiconductor Manufacturing · 1991
A new gas circulation RIEOhiwa, T.; Sakai, I.; Okumura, K. · IEEE Transactions on Semiconductor Manufacturing · 2000