Low Pressure Chemical Vapor Deposition of Silicon Carbide from Diethylsilane
- 期刊名称Journal of The Electrochemical Society
- 作者Grow, J. M.
- 卷第140卷
- 期第3期
- 印刷ISSN0013-4651
- 文件大小527.07KB
- 发表时间1993
- DOI10.1149/1.2056172
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