Fabrication of Cofired ALN Multilayer Substrates at Low Temperature Sintering
- 期刊名称MRS Proceedings
- 作者Terao, Koichi; Uchiyama, Ichiro; Hamano, Akihiro
- 卷第323卷
- 电子ISSN1946-4274
- 文件大小707.60KB
- 发表时间1993-1
- DOI10.1557/proc-323-183
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