![Difference in Thermal Degradation Behavior of ZrO
<sub/>2</sub>
and HfO
<sub/>2</sub>
Anodized Capacitors]()
Difference in Thermal Degradation Behavior of ZrO
<sub/>2</sub>
and HfO
<sub/>2</sub>
Anodized CapacitorsKamijyo, Masahiro; Onozuka, Tomotake; Yoshida, Naoto; Shinkai, Satoko; Sasaki, Katsutaka; Yamane, Misao; Abe, Yoshio · Japanese Journal of Applied Physics · 2004