CoMSaT: a single-chip fabrication technique for three-dimensional integrated fluid systems

• 作者Quanbo Zou; Zhenfeng Wang; Rongming Lin; Jiangtao Pang; Zhimin Tan; Xin Qian; Litian Liu; Zhijian Li
• 卷第72卷
• 期第2期
• 印刷ISSN0924-4247
• 文件大小4402.29KB
• 发表时间1999
• DOI10.1016/s0924-4247(98)00227-1
• 页码115-124