[IEEE Conference Proceedings. 2000 International Conference on Indium Phosphide and Related Materials - Williamsburg, VA, USA (14-18 May 2000)] Conference Proceedings. 2000 International Conference on Indium Phosphide and Related Materials (Cat. No.00CH37107) - Chemical etching of InGaAsP/InP using HBr-H/sub 3/PO/sub 4/-K/sub 2/Cr/sub 2/O/sub 7/ and its application to microlens array

• 作者Eun-Hyung Park, ; Young-Se Kwon,
• 文件大小396.68KB
• 发表时间2000
• DOI10.1109/iciprm.2000.850264
• 页码190-192