Practicalities and limitations of scanning capacitance microscopy for routine integrated circuit characterization
- 作者R. Stephenson; P. De Wolf; T. Trenkler; T. Hantschel; T. Clarysse; P. Jansen; W. Vandervorst
- 文件大小624.20KB
- 发表时间2000
- DOI10.1116/1.591231
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