![[AIP ION IMPLANTATION TECHNOLOGY: 16th International Conference on Ion Implantation Technology - IIT 2006 - Marseille (France) (11-16 June 2006)] AIP Conference Proceedings - Time Dependence Study Of Hydrogen-Induced Defects In Silicon During Thermal Anneals]()
[AIP ION IMPLANTATION TECHNOLOGY: 16th International Conference on Ion Implantation Technology - IIT 2006 - Marseille (France) (11-16 June 2006)] AIP Conference Proceedings - Time Dependence Study Of Hydrogen-Induced Defects In Silicon During Thermal AnnealsPersonnic, S.; Tauzin, A.; Bourdelle, K. K.; Letertre, F.; Kernevez, N.; Laugier, F.; Cherkashin, N.; Claverie, A.; Fortunier, R. · 2006