![Low-temperature, plasma assisted, cyclic synthesis of MoS
<sub/>2</sub>]()
Low-temperature, plasma assisted, cyclic synthesis of MoS
<sub/>2</sub>Perini, Christopher J.; Muller, Michael J.; Wagner, Brent K.; Vogel, Eric M. · Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena · 2018